FEI Quanta 3D Dual Beam

Description:

This instrument has both and electron beam, for normal SEM operations, and ion beam milling and imaging samples. The e-beam column is sourced by a tungsten filament. The ion column is a gallium source. The instrument is also equipped with EDAX EDS system and TSL backscattered electron detector.

The instrument may also be used in an ESEM mode.

Related Links:

EDAX